GLOBALFOUNDRIES Fab 7 Greenhouse Gas (GHG) Disclosure

GLOBALFOUNDRIES Fab 7
Greenhouse Gas (GHG) Disclosure

2018 Fab 7 GHG EMISSIONS in MTCO2-e*

Total GHG Emissions(Scope 1 and Scope 2)469,265
GHG Emissions from NF3 Remote Plasma Clean Processes
PFC10,388
SF60
NF37,253
HFC0
GHG Emissions from Etch and Insitu Processes
PFC130,146
SF68,044
NF321,327
HFC12,775
GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids)5,090
*The IPCC Tier 2A emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4
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