GLOBALFOUNDRIES Fab 7 Greenhouse Gas (GHG) Disclosure

GLOBALFOUNDRIES Fab 7
Greenhouse Gas (F-GHG) Disclosure

2019 Fab 7 F-GHG EMISSIONS in MTCO2-e*

Total GHG Emissions(Scope 1 and Scope 2)479,009
GHG Emissions from NF3 Remote Plasma Clean Processes
PFC10,205
SF60
NF37,125
HFC0
GHG Emissions from Etch and Insitu Processes
PFC116,574
SF67,172
NF321,511
HFC11,709
GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids)32,100
*The IPCC Tier 2A emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4
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