GLOBALFOUNDRIES Fab 1
Greenhouse Gas (GHG) Disclosure
Designed for low direct GHG emissions:
Fab 1 in Dresden is one of the largest fabs in Europe, and yet it produces very low levels of perfluorocompound emissions, which include perfluorocarbons (PFCs), SF6, NF3, and hydrofluorocompounds (HFCs). Fab 1 was designed for extremely low emissions of these materials, which is accomplished by utilizing low-emission gases in Chemical Vapor Deposition (CVD) chamber cleaning, coupled with near-universal use of point-of-use abatement equipment for processes using perfluorocompounds.
Low-carbon energy supply:
Fab 1 is mainly powered by two specially designed, highly efficient trigeneration plants, along with a small fraction of electricity from the Dresden public grid. Energy Centers I and II burn natural gas to supply Fab 1 with electricity, with fab heating and cooling generated mainly from the trigeneration plants’ waste heat. Trigeneration is much more efficient than conventional coal or natural gas power plants.
2019 Fab 1 GHG EMISSIONS in MTCO2-e*
|Total GHG Emissions(Scope 1 and Scope 2)||300,046|
|GHG Emissions from CVD Processes||PFC||1,813|
|GHG Emissions from Etch Processes||PFC||6,031|
|GHG Emissions from Use of FHTF (Fluorinated Heat Transfer Fluids)||22,334|
*The IPCC Tier 2B emission inventory calculation methodology was used. As per industry standard practice, an NF3 default destruction efficiency was used when the device’s specified destruction efficiency justified it, even if the device does not abate CF4.