MEMS Mainstream Technologies

Full product solution of MEMS process with CMOS integration

MEMS TechnologyGLOBALFOUNDRIES mainstream platforms from 180nm to 40nm offer mixed-technology solutions on volume production-proven, industry-compatible processes.

GLOBALFOUNDRIES MEMS technology is a full product solution of MEMS process with CMOS integration. The company leverages mature 200mm CMOS manufacturing infrastructure to deliver MEMS devices at volume production levels. A flexible set of production-proven MEMS process modules are tailored to the needs of each customer, including a one-stop shop for both MEMS sensors / actuators and companion CMOS chips.


MEMS micromachining, encapsulation, metrology and inspection, plus engineered SOI wafers from dedicated manufacturing infrastructure

  • Class 1, CMOS compatible MEMS cleanroom
  • Class 100/1000, dedicated MEMS cleanroom
  • Global-FoundryView portal
  • Compliance to QA quality standards ISO/TS16949 requirements
  • Real-time SPC, equipment SPC, electronic quality systems

Targeted applications

  • Accelerometers
  • Gyroscopes
  • Actuators
  • Timing and RF devices

MEMS and CMOS integration options

  • Traditional/SIP, WLP, WLP Smart Fusion, WLP Smart Fusion with TSV, WLP MEMS on CMOS

IP protection from compliance with strict Singapore IP protection laws

Collaborative development includes available turnkey packaging and testing services.